| 摘要 |
PURPOSE:To analyze defective LSIs easily by providing a means graphically displaying a circuit-design data file and an input means indecating an element position on a circuit diagram to be analyzed and obtaining the element position on an LSI chip from the circuit diagram by the processing means of a circuit- design data file information and an arrangement-design information about the element position being indicated. CONSTITUTION:A circuit-design data file information 1 and an arrangement- design data file information 2 are inputted to an electronic computer 3, and a circuit diagram is displayed to a display 4 on the basis of the circuit-design information 1. A coordinate input unit 5 is used for inputting an element position on the circuit diagram to be analyzed. The coordinate information is converted into a coordinate position on an LSI chip by employing the electronic computer 3, referring to hte arrangement-design information 2. The coordinate position data are transmitted over an X and Y drive control section 6, and each drive 7, 8 of X and Y is driven. Consequently, a stage 9 on which an LSI to be tested is loaded is moved, and an element section to be analyzed is transferred to the center of the visual field of a microscope 11. Accordingly, the only for an inspector 12 is to examine through the microscope.
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