发明名称 Apparatus for Thermal Control of Tubing Assembly and Associated Methods
摘要 Tubing structures are connected to each other to form a tubing assembly having one or more fluid pathways from a fluid entrance to a fluid exit. A heating device is bonded to the tubing structures along a length of the tubing assembly. The heating device has a flexibility to follow along one or more bends present along the length of the tubing assembly. The heating device includes one or more heater traces embedded within an encasing material. The encasing material is thermally conductive and electrically insulative. The one or more heater traces are formed of a material that generates heat in the presence of an electrical current. The heating device has a continuous and unbroken structure along the length of the tubing assembly. An encapsulation layer of thermal insulating material is disposed over the tubing assembly and covers the heating device.
申请公布号 US2016320091(A1) 申请公布日期 2016.11.03
申请号 US201615209006 申请日期 2016.07.13
申请人 Lam Research Corporation 发明人 Leeser Karl F.
分类号 F24H1/10;F24H3/00;H01L21/677;H01L21/67;H01L21/687;F28F13/18;H05B3/56 主分类号 F24H1/10
代理机构 代理人
主权项 1. A tubing assembly, comprising: a plurality of tubing structures connected to each other in a configuration providing one or more fluid pathways through the plurality of tubing structures from a fluid entrance of the plurality of tubing structures to a fluid exit of the plurality of tubing structures; a heating device bonded to the plurality of tubing structures along a length of the plurality of tubing structures in their connected configuration, the heating device having a flexibility to enable its placement along one or more bends present along the length of the plurality of tubing structures in their connected configuration, the heating device including one or more heater traces embedded within an encasing material, the encasing material being thermally conductive and electrically insulative, the one or more heater traces formed of a material that generates heat in the presence of an electrical current, the heating device having a continuous and unbroken structure along the length of the plurality of tubing structures in their connected configuration; and an encapsulation layer of thermal insulating material disposed over the plurality of tubing structures and covering the heating device.
地址 Fremont CA US