| 摘要 |
PURPOSE:To obtain high dimensional precision by applying support force of a squeeze air membrane and repulsive force of a permanent magnet to a composite bearing so as to support the composite bearing with non-contact with the movable part. CONSTITUTION:When alternating voltage is applied on each of piezoelectric materials 21 and 22 of each vibrator 11 and 12 through each of lead wires 34 and 35 so as to make vibrating faces 13 and 14 vibrate respectively, squeeze air membrane force is produced within micro-clearances 30 and 31 between these vibrating faces 13 and 14 and a movable part 19. Thereby, the movable part 19 is supported with non-contact in the thrust direction. Further, the movable part 19 is supported with non-contact in the radial direction by the aid of repulsive force between permanent magnets 16 and 20. Accordingly, the vibrating faces 13 and 14 for forming a squeeze air membrane and faces 32 and 33 opposed to the movable part 19 are flat, and high work precision can easily be obtained.
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