| 摘要 |
PURPOSE:To such in effectively mist-like resist floating in the upper space of a substrate to be subjected to spin coat, and exclude it from a cup, by providing exhaust ducts to discharge the mist-type resist with the upper and the lower parts of a cup. CONSTITUTION:From a nozzle 3 resist is dripped down on the surface of a substrate 1 held by a vacuum chuck 2, and subjected to spin coat by a motor 7 under a specified number of revolutions. Then the resist scattered by a centrifugal force flows into a drain 5. The resist floating in the state of mist in the lower part of a cup 4 is sucked in by an exhaust duct 6 in the lower part. The resist floating in the state of mist in the upper part of the cup 4 is sucked in by an exhaust duct 8 in the upper part. Consequently the resist in the state of mist does not drop and stick on the surface of the substrate 1, and a resist film of extremely high quality can be easily formed on the surface of the substrate 1.
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