| 摘要 |
PURPOSE:To measure accurately even a minute change in a sample surface, by accurately grasping the change in the intensity of irradiation during a measurement time. CONSTITUTION:In mapping a measured region C, a corpuscular ray measuring plate 1 is set near the measured region C, and the plate is also scanned on every X-axis scanning line to perform line analysis. After that, scanning is performed on the next scanning line in the direction of a Y-axis. All the measured region C is thus scanned to perform surface analysis. Since a substance of uniform quality is applied or stuck as a reference sample to the surface of the measuring plate 1, X-rays emitted from the measuring plate are proportional to the intensity of irradiated corpuscular rays. The position of the irradiation (measurement) of the corpuscular rays is detected in terms of a driving signal which is supplied to a stage driver 8. A detected value in the measurement position is stored in a CPU 9. Data on the measuring plate 1 are extracted out of the stored data in the CPU 9 to measure the change in the intensity of the irradiation of the corpuscular rays. The data are corrected on each X-axis scanning line to which the data belong.
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