| 摘要 |
PURPOSE:To simultaneously measure a plurality of measuring objects, by holding the count value of a count means when the edges of an object to be measured are detected and measuring the dimension of the object to be measured on the basis of the count value between the edges of the object to be measured. CONSTITUTION:A clock pulse oscillator 39, a count means 40 for counting the clock signal from said oscillator 39 and an edge detection circuit 33 for detecting the edges of an object to be measured on the basis of the detection signals of light detection means 28, 29 are provided. Further, latch means 32, 36 respectively holding the count value of the count means 40 at that time in response to the edge signal outputted from the edge detection circuit 33 and the count value of the count means 40 at that time in response to the edge signal outputted next to the previous edge signal and an operation means 31 for operating the dimension of the object to measured on the basis of both count values held to the latch means 32, 36 are provided. By this constitution, a plurality of objects to be measured can be measured simultaneously.
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