| 摘要 |
PURPOSE:To decrease product cost by assembling a general-use sliding projector with a clear existing performance and an X-Y positioning device and constituting a system. CONSTITUTION:To a board 1 in which a substrate is placed and a repairing work is executed, the light projected from a projector 2 permeates a slit plate 3 and the mark is projected. An X-Y table 5 to drive the slit plate 3, the projec tor 2, etc., are fixed to a frame A6, and further, fixed rotatably to a frame B9. A frame C12 is shiftably fixed in the upper and lower directions to the board 1 through a Z shaft rail 14 and an automatic position display device is constituted. The general-use projector 2, X-Y table 5, etc., are used and the whole system is constituted by assembling this.
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