| 摘要 |
PURPOSE:To accurately and easily inspect the fitting state of a package parts at a high speed by projecting laser slit light slantingly upon a printed circuit board and the parts. CONSTITUTION:The laser light from a laser light source 5 is inputted so a slit light generation part 4 to obtain the laser slit light 3, which illuminates the printed circuit board slantingly and a parts 1 slantingly to the fitting direction of the parts 1 to form a bright line 2 on the surface of the parts and printed circuit board. Then, the image of the parts 1 is picked up by an ITV camera 6 from above and the output of the camera 6 is converted by a binarization processing part 7 into a binarization signal so that the bright line 2 is obtained as an image. Then, an end point detection part 8 measures the end point position of the bright line 2, an arithmetic part 9 calculates the position shift distance, inclination, and height of the parts, and a decision part 10 decides whether or not the parts fitting state is normal and outputs the decision output. Consequently, the fitting state of the package parts is easily and accurately inspected at a high speed.
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