FORMATION OF THIN FILM,申请号JP19860218179-传众专利搜索

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发明名称	FORMATION OF THIN FILM
摘要
申请公布号	JPS6376860(A)	申请公布日期	1988.04.07
申请号	JP19860218179	申请日期	1986.09.18
申请人	FUJITSU LTD	发明人	MIYAZAKI MASAHIRO;NAITO KAZUNORI;SHIBATA ITARU;OKADA SEIJI
分类号	C23C14/06;C23C14/34;G11B7/26;G11B11/10;G11B11/105	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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