BORON DIFFUSION SOURCE AND METHOD OF DIFFUSING BORON,申请号JP19860219777-传众专利搜索

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发明名称	BORON DIFFUSION SOURCE AND METHOD OF DIFFUSING BORON
摘要
申请公布号	JPS6376420(A)	申请公布日期	1988.04.06
申请号	JP19860219777	申请日期	1986.09.19
申请人	FUJITSU LTD	发明人	FUJIMURA SHUZO;TAKECHI SATOSHI;NAKAMURA HIROKO
分类号	H01L21/22;H01L21/225	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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