| 摘要 |
PURPOSE:To enable the manufacturing of a magnetic substance film having a high saturated magnetic flux density and exhibiting a high relative permeability by finely stacking magnetic films composed of a metal consisting of an iron group element or composed of an alloy consisting of these and having a high saturated magnetic flux the density and intermediate layers composed of a compound that forms an intersticial solid solution with this metal or alloy into a plurality of layers of one or more cycles. CONSTITUTION:A magnetic superlattice film 14 has magnetic films 12 having a high staturated magnetic flux density which are composed of a single metal consisting of Fe, Co or Ni, or an alloy containing these metals, or an alloy mainly composed of these metals and containing elements such as C, Si, B, N, Ti. Intermediate layers 13 to be stacked on the magnetic films 12 need to be thin films composed of a single element selected, for instance, from B, C, S and the like or thin films composed of a compound containing an element selected from B, C, N, P and the like, and forms an intersticial solid solution with the metal or alloy constituting the magnetic films 12. By finely staking them into a plurality of layers of one or more cycles, a magnetic substance film which is excellent and has a high saturated magnetic flux density and a high relative permeability can be obtained.
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