| 摘要 |
PURPOSE:To improve coercive force and to improve the corrosion resistance and wear resistance characteristics of a magnetic recording medium by depositing a ferromagnetic metal by evaporation on a nonmagnetic substrate while blowing gaseous oxygen thereto and forming a vapor deposited film with high efficiency while preventing the disorder in the crystal growth of the metal. CONSTITUTION:After a PET film 4 is mounted to a tape transfer device 10, the inside of a vacuum vessel 1 is maintained at a high vacuum by an evacuation device 2 and the gaseous oxygen is supplied from a 1st supply device 41 into the vacuum vessel 1. The flow of the gaseous oxygen is simultaneously acted on the surface of the PET film to be deposited with the evaporating metal by a 2nd supply device 45. A partially oxidized Co-Ni alloy is uniformly and efficiently deposited by evaporation on the PET tape in the thickness direction thereof if the Co-Ni alloy is heated and operated by operating an electron beam heater 22 and the tape is run simultaneously by the device 10. Since the oxygen of a uniform pressure is thereby acted on the deposited film, the high coercive force is assured and the vapor deposition efficiency is improved while the same squareness ratio is maintained. There is no disturbance in the gaseous flow of the oxygen and the distribution control of the oxidation degree in the thickness direction of the vapor deposited film is permitted; therefore, the corrosion resistance and wear resistance of the vapor deposited film are improved.
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