| 摘要 |
PURPOSE:To manufacture a magnetic thin film which can provide a high density of magnetic flux using safety material, by subjecting biscyclopentadienyl complex salt of iron to vapor phase decomposing by means of plasma within reducing atmosphere containing nitrogen and argon under a reduced pressure to form the magnetic thin film on a substrate by vapor growth. CONSTITUTION:Biscyclopentadienyl complex salt of iron (ferrocene) is subjected to vapor phase decomposing chemical reaction by using plasma within reducing atmosphere containing nitrogen and argon under a reduced pressure, so that a magnetic field is formed on a substrate 1 by vapor growth. For example, using a plasma apparatus as shown in the drawing, a glass plate as the substrate 1 is heated to 200 deg.C by a heater 4 while a vacuum vessel 2 is evacuated to 1X10<-6> torr. Hydrogen gas is supplied from a bomb 5, nitrogen gas is supplied from a bomb 5' and argon gas is supplied from a bomb 6 to the vacuum vessel 2. Subsequently, after ferrocene is supplied from a bomb 7 into the vacuum vessel 2, the degree of vacuum within the vacuum vessel 2 is controlled to be 0.1 torr and a high frequency wave of 13.56 MHz is applied by an RF power source 11 so that a magnetic thin film is formed.
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