| 摘要 |
PURPOSE:To eliminate the generation of a shift of a reflecting optical axis by constituting the titled stage of a V-shaped reflecting mirror or prism to which a light reflecting surface is orthogonal. CONSTITUTION:In both cases of a V-shaped reflecting mirror 14 to which a light reflecting surface is orthogonal, shown in a figure (a), and a prism 15 to which a light reflecting surface is orthogonal, shown in a figure (b), they have a total reflecting surface being orthogonal to each other, therefore, even if a mirror itself is inclined by following up an inclination of a stage 9 to which mirrors 14, 15 are attached, the reflected light can be maintained in parallel against incident light. Accordingly, a shift of an optical axis caused by an inclination of the mirror is eliminated, and even if the mirror is attached to the inclined stage 9, the reflected light can be received exactly by a receiver of a laser measuring machine which is not shown in the figure, therefore, the position of the stage 9 can be measured.
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