| 摘要 |
PURPOSE:To obtain a photoconductive sensitized material for electrophotography in which a hydrogenated amorphous carbon film is formed, by inserting a conductive substrate in a chemical deposition equipment of high vacuum, into which a dopand and acetylene gas are introduced, and applying electron impulse for manufacturing. CONSTITUTION:Prom a under part 14, a conductive substrate 5 is inserted in a chemical deposition equipment 1 which is highly vacuumized, acetylene gas 7a and a dopant 7b are mined and introduced into the inside, and the electron beam of a high frequency plasma generating equipment 15 is accelerated by a mesh-type electrode 2. The substrate 5 is heated, via a quarz glass window 12, by a halogen lamp 10 provided with a reflecting plate 11. By this manufacturing method, acetylene molecules and dopant molecules are attached on the substrate 5, which are decomposed by the bomlardment of the electron bean, and form a hydrogenated amorphous carbon film subjected to doping. This has excellent photo conductivity, and is useful for sensitized material for electrophotography because of hardness and chemical inertness.
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