| 摘要 |
PURPOSE:To ensure the proper adhesion and retaining of a membrane on a separation direction setting board by constituting the membrane adhesion surface of said board from a conductive member, providing the member on an insulation material and forming a membrane adsorption hole through the member and the board. CONSTITUTION:A Coulomb force due to capacitance works between the membrane adhesion surface 5A of a separation direction setting board 5 and a cover film 1d separated from a substrate 1. Therefore, the cover film 1d can be properly adhered and retained on the separation direction setting board 5. Furthermore, a suction force works for adsorbing the cover film 1d onto the adsorption surface 5A of the separation direction setting board 5 via a membrane adsorption hole 5E. Therefore, the cover film 1d laid on the substrate 1 can be properly separated and adhered/retained on the separation direction setting board 5, thereby preventing the occurrence of an improper substrate.
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