| 摘要 |
PURPOSE:To perform the accurate quantitative analysis of a components such as water or oxygen and nitrogen, by holding the circumference of the connection part of a vacuum container and a mass spectrometer to the vacuum degree almost the same to that of the vacuum container. CONSTITUTION:The space formed between an outer container 20 and a vacuum container 1 is held to the vacuum degree almost the same to that in the container 1 by a rotary pump 21 and an oil diffusion pump 22. Therefore, the mixing of air with specimen gas due to the leakage from a connection part 11 is suppressed and the quantitative analysis of the components contained in air such as moisture, oxygen, nitrogen or carbon dioxide in the seal gas of a specimen 10 can be performed with good accuracy.
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