| 摘要 |
PURPOSE:To obtain the titled substrate having excellent wear resistance and small coefft. of friction by forming a nitride layer on a nonmagnetic substrate in such a manner that nitrogen is diffused from the surface of the nitride layer into the surface of the substrate at the concn. thereof decreases from the surface toward the inside. CONSTITUTION:The substrate 13 is, for example, an Al alloy disk having 133mm diameter and is mounted to a substrate holder 12 in a vacuum vessel 11. The substrate 13 is mounted on a water-cooled plate in the vacuum vessel 1 and after the inside of the vessel 11 is evacuated to the vacuum higher than 10<-6>Torr, nitrogen ions are implanted to the surface of the substrate 13 by using a basket type ion source 15. The implantation conditions of this time are 20kV acceleration voltage, 0.1A current and 5X10<13> pieces ions/cm<2>. An ion beam 14 and an electron beam vapor deposition device 16 are provided. The magnetic disk plate obtd. by this device is free from deterioration in material properties and deformation, has the excellent wear resistance and adhesion to the substrate 13 and is decreased in the coefft. of friction.
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