| 摘要 |
PURPOSE:To measure even plural ICs simultaneously and to improve the flexibility of an inspecting device by switching connections between plural measuring circuits and pin connection terminals according to control information corresponding to the number of the ICs. CONSTITUTION:The control information corresponding to the number of ICs to be measured simultaneously is loaded in a register 7 from a CPU 4 according to the number of the ICs to be measured, and a bit pattern for specifying pins to be measured is loaded in a pin register 3. Consequently, a correspondence switching circuit 6 make the respective bits of shift registers 51-54 correspond to the pin connection terminals P1-P128. Then corresponding contacts C of relays RL1-RL128 are made corresponding to the bit of the registers 51-54 with a data signal D from a shift control circuit 8 to connect DC measuring circuits I1-I4 to the pin connection terminals. Thus, the measuring circuits are connected to pins of the plural ICs with have the same number to perform measurement, and the flexibility of the inspecting device is improved.
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