发明名称 Semiconductor device and method of manufacturing same
摘要 A semiconductor device comprises a semiconductor body having a surface provided with a first insulating layer. On this first insulating layer at least one pattern of conductor strips, coated with insulation strips having projecting edges, is provided. Under projecting edges of a second insulating layer, the conductor strips are coated with insulating tracks which fill the spaces under the edges and which at least at the area where they adjoin the first insulating layer can be selectively etched with respect to this layer. The conductor strips may be made of materials other than polycrystalline silicon, such as tungsten, molybdenum, and silicides of these metals. The thickness of the first insulating layer is affected to a very small extent during manufacture of the device, while its depth remains unchanged.
申请公布号 US4763185(A) 申请公布日期 1988.08.09
申请号 US19830507409 申请日期 1983.06.24
申请人 U.S. PHILIPS CORPORATION 发明人 PEEK, HERMANUS L.
分类号 H01L29/762;H01L21/339;H01L21/8234;H01L27/148;(IPC1-7):H01L29/34 主分类号 H01L29/762
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