| 摘要 |
PURPOSE:To enable the functional test of wafers to be performed meeting the optimum lighting requirements corresponding to respective testing items for shortening the testing time and enhancing the accuracy in judgement by a method wherein a light source for irradiating a wafer is made controllable according to the control signals from a functional tester. CONSTITUTION:A light source 10a provided above a prober P for irradiating a wafer 4 is connected to a cable 12 and a functional tester 1 through the intermediary of a control circuit 11. This control circuit 11 fills the controlling role of lighting and putting out the light source 10 according to the signals from the functional tester 1. Through these procedures, even if a test requiring of extinguished light such as a leakage current test as well as another test requiring of irradiated light such as a data sustaining characteristics test are to be performed jointly, the functional test of wafer 4 can be performed meeting the optimum lighting requirements corresponding to the respective items so that the testing time can be shortened while enhancing the accuracy in judgement.
|
