发明名称 HIGH VOLTAGE GENERATING DEVICE FOR ELECTRON MICROSCOPE
摘要 PURPOSE:To detect a discharge starting voltage so as to prevent undesired discharge due to application of an excessive voltage by providing a means for controlling a voltage application means interlocking with a discharge detecting device. CONSTITUTION:When an aimed voltage Vs is applied, data is sent to a voltage application means 2 such as a digital-analog converter from a microcomputer 1 so that a voltage is raised at every step of several hundreds of V for several hundreds of mus from a voltage which is made smaller by ten percent than the aimed voltage Vs. The voltage application means 2 outputs a voltage in accordance with this data. A differential amplifier 3 is operated by this output voltage and a feedback voltage applied through a high resistance 7. A d-c voltage of several tens of V, which is outputted from the amplifier 3, is turned ON/OFF by switching transistors in a primary transfer circuit 5 so that a d-c high voltage is generated at a high voltage transformer 6. Since the high voltage is thus used stably from the aimed voltage Vs, large discharge can be prevented and the high voltage can be stably supplied.
申请公布号 JPS63195942(A) 申请公布日期 1988.08.15
申请号 JP19870026284 申请日期 1987.02.09
申请人 HITACHI LTD 发明人 SATO YUJI
分类号 H01J37/248 主分类号 H01J37/248
代理机构 代理人
主权项
地址