HEAT TREATMENT EQUIPMENT FOR SUBSTRATE

摘要

PURPOSE:To shorten the temperature-rise and temperature-drop time while preventing the deterioration and disconnection of an electric heating body resulting from overheating with heat accumulation by supporting the electric heating body by cylindrical support members disposed in parallel with the axis of a core pipe so that the periphery of the core pipe is surrounded by the electric heating body. CONSTITUTION:A core pipe 2 housing substrates 1, a heating means 3 supporting an electric heating body 4 by insulating heat-resistant support members 5 so that the periphery of the core pipe 2 is surrounded by the electric heating body 4, and an outer-cylinder furnace body 10 into which the core pipe 2 and the heating means 3 are inserted and housed are provided, and the substrates 1 to be treated stored in the core pipe 2 are thermally treated. In such a substrate heat treatment equipment, a plurality of cylindrical support members 5 as the insulating heat-resistant support members are disposed and constituted in parallel with the axis of the core pipe 2 in the periphery of the core pipe 2 while a reflecting film 10a reflecting infrared rays is applied and shaped onto a circumferential surface oppositely facing the heating means 3 of the outer-cylinder furnace body 10. The electric heating body 4 is organized of a beltlike electric heating body while being constructed in a detachable and exchangeable manner along the cylindrical support members 5.