| 摘要 |
PURPOSE:To miniaturize a device as well as to make highly accurate flow control attainable, by installing a valve body to be controlled for its opening and closing by a sensor part and a piezostack, between an inlet and an outlet of fluid. CONSTITUTION:In an interval between the fluid inlet 3 and the fluid outlet 4 formed in a substrate 1, there are provided with a sensor part 11 and a valve body 21 being controlled for its opening and closing by a valve body driving part 31 consisting of a piezostack. With this constitution, since this valve body driving part 31 is miniaturizable, a mass flow controller can be made yet smaller in size as a whole. In addition, time for occurrence of a strain of the piezostack is very short so that responsiveness is improved and, what is more, opening of the valve body 21 is accurately adjustable, thus flow control ranging from minute flow to large flow can be done at high speed and high accuracy.
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