| 摘要 |
PURPOSE:To produce hyperfine powder of cubic TaN having high purity, stability at high temp., and high superconductivity by evaporating hexagonal TaN by irradiating a target of the hexagonal TaN with laser light under a specified condition, then transforming the hexagonal TaN to cubic TaN by causing phase transfer by quenching atmosphere. CONSTITUTION:A target material 5 consisting of hexagonal TaN powder or its formed body is mounted on a target base 6 in a reaction vessel 9. Then, after evacuating the inside of the reaction vessel 9 with a vacuum pump 11, the pressure inside of the reaction vessel 9 is held at 50-760Torr by introducing inert gas and/or N2 gas from a bomb 12. Thereafter, the hexagonal TaN is evaporated by irradiating the target material 5 with laser light 13 generated with a CO2 gas laser oscillator 1 through a mirror 2, lens 3, and a window 4. The evaporated hexagonal TaN is quenched immediately thereafter in the atmosphere to cause phase transfer to cubic TaN, and hyperfine powder of cubic TaN having high purity which has deposited to the wall of the vessel 9 is recovered.
|
