摘要 |
PURPOSE:To soften the matrix to enhance the molecular movement of a sample, to improve the ionization efficiency of the sample, and to obtain a spectrum of a good sensitivity, by furnishing a heater on a sample table to raise the temperature. CONSTITUTION:A current is let flow in a primary ion source 1 by a filament 2, the gas for the primary ion such as argon or xenon is ionized by the produced thermions into primary ion beams 3, and they are radiated on a sample and a matrix spread on a sample table 7 in a secondary ion source 4. The sample ions 10 obtained by the radiation is mass-dispersed in a magnet 11, and the ions only passing through a collector slot 12 are entered to a collector B to obtain a mass spectrum specific to the sample. In the sample table 7, a sample table heater 5 and a sample table heater current control 6 are arranged. And the current flowing from the outside of secondary ion source 4 to the heater 5 is regulated by the control 6, and when the matrix is difficult to mix with the sample in a normal temperature, the temperature of the sample is raised, and the ionization is carried out in an optimum temperature.
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