| 摘要 |
PURPOSE:To achieve a higher measuring accuracy and higher resolutions, by arranging partially circular photoelectric conversion elements as displaced circumferentially to eliminate a gap substantially in radial direction mutually. CONSTITUTION:In a photoelectric conversion sensor 21, photoelectric elements 22 (22i, 22i+1...) are partially circular in shape and arranged as displaced circumferentially. For example, the elements are so arranged that one element is displaced by 180 deg. from the adjacent one 22 to achieve coincidence between the inner radius of an (i)-th element 22i and the outer diameter of an (i-1)-th element 22i+1 while the outer radius of the element 22i coincides with the inner radius of the (i+1)-th element 22i+1. In other words, as a scattered light intensity pattern is concentrically circular in symmetry with the optical axis, the fact that each element 22 takes the partially circular shape causes no inconvenience while it can eliminate a gap between the elements 22 radially in actual efficiency thereby achieving a higher measuring accuracy and higher resolutions.
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