| 摘要 |
PURPOSE:To obtain a light-weight piezoelectric deflection element wherein the vibration fatigue of a junction part and the like do not generate and the reliability is excellent, by making the length of a substrate having springiness longer than that of the piezoelectric plate. CONSTITUTION:The length of a metal substrate (shim material) 3 having springiness is made longer than that of a piezoelectric plate 10. By processing the form of an extending part of the metal substrate 3, it can be utilized as a vibrating plate, and a fixed frame part 4 such as a magnetic head, a mirror and a filter can be made so as to be unified in a body on the extending part of the metal substrate 3 by a press-process or an etching process. A light shielding plate and the like can be formed by a bend or a torsional deformation 9 after making up the form of a tip part of the extending substrate 3 in a prescribed shape. |
