摘要 |
PURPOSE:To obtain ultrahigh speed and low noise characteristics resistant against a temperature change by continuously varying the composition of an element component to be added to a magnifying region in a resonance ionization type avalanche photodiode. CONSTITUTION:A magnifying region 13 in which an element component to be added to generate a resonance is continuously varied in a thicknesswise direction is formed in a resonance ionization type avalanche photodiode. That is, the composition of an element component to be added of the magnifying region is so continuously varied in a structure as to present a resonance point in a predetermined temperature range at an ambient temperature as a center. Thus, even if the temperature alters according to an environment, constant high speed and low noise characteristics are obtained.
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