| 摘要 |
PURPOSE:To enlarge a life of a shutter, by using a shutter cooling matter to cool the shutter which is disposed just before a radiation port of a molecular beam source cell so that a temperature of the shutter is lowered. CONSTITUTION:This device is provided with the following parts: a molecular beam source cell 1, a shutter 2 which is disposed just before a radiant port 1a of the molecular beam source cell 1 and controls the amount of molecular beams 1b sent from the radiant port 1a, and a shutter cooling matter 3 which cools the shutter 2. Since the shutter 2 disposed just before the radiation port 1a of the molecular beam source cell 1 is thus cooled by the shutter cooling matter 3, reactions between the molecular beams 1b, which are radiated from the radiation port 1a, and the shutter 2 are reduced to enable the enlargement of a life in the shutter 2.
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