| 摘要 |
PURPOSE:To efficiently remove an organic component by oxidizing the micro- organic component contained in ultrapure water and thereafter filtering the oxide with a semipermeable having sulfonate radical. CONSTITUTION:Organic components contained in ultrapure water are oxidized in the presence of oxygen or an oxidizing agent (e.g. hydrogen peroxide and ozone, etc.,) by irradiation with ultraviolet rays. Then this ultrapure water is filtered by using a semipermeable membrane having sulfonate radical (ultrafiltration membrane and reverse osmosis membrane having differential mol.wt. not more than 2,000 for neutral organic substance are preferable). Thereby even micro-organic component can be efficiently removed.
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