PRODUCTION OF PYROELECTRIC TYPE INFRARED RAY ARRAY SENSOR

摘要

PURPOSE:To register the patterns of lower electrodes and thin pyroelectric films without executing mask alignment by forming the thin pyroelectric films on the lower electrode, then patterning the lower electrode with the thin film itself as a mask. CONSTITUTION:The lower electrode 2 is formed on the surface of a substrate 1 and thereafter, the thin pyroelectric films separated by each of the elements are formed atop the same. The parts 6 of the lower electrode 2 between the respective elements are then etched away with the thin pyroelectric films as a mask. The patterns of the lower electrodes and the thin pyroelectric films are thereby registered without executing the mask alignment of the lower electrodes and the thin pyroelectric films. Upper electrodes 4 are thereafter formed on the thin pyroelectric films 3 and the substrate 1 is partly 5 etched away to suppress the heat conduction from the thin films 3 to the substrate 1.