| 摘要 |
PURPOSE:To determine the optimum supplementary element density and improve the superconductivity characteristic by laminating a thin film of an oxide superconducting material and a thin film of a compound containing a supplemental element to this film and heat-treating the laminated thin film in a vacuum or the gas atmosphere. CONSTITUTION:The element powder is mixed at the ratio of La:Sr:Cu 1.85:0.15:1 and pressed and baked to form a target T1. Separately, an SrF2 target T2 is prepared. The high-frequency spattering is performed in the Ar gas atmosphere with the T1 to form a thin film 2 of an La-Sr-Cu-O superconducting material on a sapphire substrate 1. Many void grid points are contained in the thin film 2. Next, the spattering is performed with the T2 target to overlap an SrF2 thin film 3. These processes are repeated to form a laminated thin film 4, which is heat-treated in the O2+F2 atmosphere, and a uniform superconductor thin film is formed by the relative diffusion. F is supplemented in the void grid. The thickness of the thin film 3 is controlled so as to optimize the density of the F in the superconductor, and the superconductivity characteristic can be improved.
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