发明名称 DEVELOPMENT DEVICE
摘要 PURPOSE:To prevent any defective development from occurring by a method wherein a processed body is arranged in a cup member formed into a dip vessel of developer while a feeder channel of a developer to be fed to the cup member is provided in the cup member itself within a development device to dip-develop the processed body. CONSTITUTION:An enclosure is structured by a cylindrical upper cup 20 and a cylindrical lower cup engaged with the lower side end of the former cup 20 arranged independently to be lifted freely. Besides, this enclosure is provided with an inner cup 30 as a cylindrical cup member while a recession 31 is provided to form a dip vessel on the surface of cup 30. Furthermore, a developer feeder pipe 33 piped upward from the bottom surface of inner cup 30 is provided on an outer end part 32 of inner cup 30 and the upper end of pipe 33 is communicated with a developer discharge port 34, e.g., to be quarterly divided for isertion into the inner periphery of recession 32 of inner cup 30. Through these procedures, any defective development due to dispersion of discharge pressure can be prevented from occurring.
申请公布号 JPS63271931(A) 申请公布日期 1988.11.09
申请号 JP19870106126 申请日期 1987.04.28
申请人 TOKYO ELECTRON LTD 发明人 MATSUOKA FUMINORI
分类号 H01L21/30;G03D5/04;G03F7/30;H01L21/027 主分类号 H01L21/30
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