| 摘要 |
PURPOSE:To prepare the title solvent having excellent flame retardancy, by mixing a particular arom. hydrocarbon solvent with flon 118. CONSTITUTION:An arom. hydrocarbon solvent comprising an arom. component having 8-9 carbon chains among petroleum fractions is mixed with 5-20wt.% flon 118 to prepare the title solvent. Because of disappearance of the flash point, this solvent is very safe from the fire, which renders the solvent usable for degreasing and a cleaning device in a semiconductor production process without use of a flame-proof construction, a fire-resistant material, etc.
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