发明名称 DICING SHEET WITH PROTECTIVE FILM FORMING LAYER AND METHOD FOR PRODUCING CHIP
摘要 PROBLEM TO BE SOLVED: To provide a dicing sheet with a protective film formation layer which can easily produce a semiconductor chip having a protective film having high uniformity and superior printing precision, can easily perform peeling between the protective film and the dicing sheet, and has superior affixing ability of chips during dicing.SOLUTION: A dicing sheet with a protective film formation layer includes an energy ray curable protective film formation layer which is provided on, in a peelable manner, an adhesive layer of an adhesive sheet in which the adhesive layer containing an adhesive component and a free epoxy group-containing compound by being laminated onto a substrate film.SELECTED DRAWING: Figure 1
申请公布号 JP2016219841(A) 申请公布日期 2016.12.22
申请号 JP20160170088 申请日期 2016.08.31
申请人 LINTEC CORP 发明人 SAEKI NAOYA;SHINODA TOMONORI;TAKANO TAKESHI
分类号 H01L21/301;B32B27/00;C09D7/12;C09D163/00;C09D201/00;C09J7/02;C09J11/08;C09J201/00 主分类号 H01L21/301
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