发明名称 X-RAY GENERATOR
摘要 PURPOSE:To reduce the wear of a plasma generating electrode and reduce the size of a device by arranging a discharge gap parallel with the plasma generating electrode within a same container. CONSTITUTION:Opposing plasma generating electrodes 31, 32 are provided in a discharge container 13, With the electrode 32 connected to an energizing passage 33. Discharge gaps 17 are oppositely arranged on the electrode 31 and the energizing passage 33. A condenser 1 is charged from a charger 7 via a current limiting resistor 6. After charging, when a discharge switch 2 is turned on, discharging starts between the plasma generating electrodes 31 and 32, discharge plasma pinches, and X-rays 5 are generated from within the plasma of a high temperature and a high density. When the plasma is generated, the vacuum in the container 13 weakens. Aa a result, the dielectric strength of the discharge gap decreases and the discharge gap works in the middle of a damping oscillation current wave form. As a result, the current after the gap has worked does not flow to the plasma generating electrode and therefore the wear thereof is reduced.
申请公布号 JPS6457551(A) 申请公布日期 1989.03.03
申请号 JP19870212803 申请日期 1987.08.28
申请人 HITACHI LTD 发明人 ARITA HIROSHI;SUZUKI KOJI;KUROSAWA YUKIO
分类号 H01J35/22;H01L21/027;H01L21/30;H05G1/00;H05G2/00 主分类号 H01J35/22
代理机构 代理人
主权项
地址