| 发明名称 |
A METHOD OF FABRICATING A FLUORINATED,P-DOPED MICROCRYSTALLINE SILICON-BASED SEMICONDUCTOR ALLOY |
| 摘要 |
<p>A fluorinated, p-doped microcrystalline semiconductor alloy material; electronic devices incorporating said p-doped material; and the method for fabricating said p-doped material.</p> |
| 申请公布号 |
IN164419(B) |
申请公布日期 |
1989.03.18 |
| 申请号 |
IN1985DE84719 |
申请日期 |
1985.10.11 |
| 申请人 |
SOVONICS SOLAR SYSTEMS |
发明人 |
GUHA, SUBHENDU;KULMAN, JAMES;OVSHINSKY, STANFORD ROBERT |
| 分类号 |
C23C16/22;H01L21/205;H01L29/04;H01L31/06;H01L31/075;(IPC1-7):H01L21/24 |
主分类号 |
C23C16/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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