EMBEDDING OF GROOVE,申请号JP19870232823-传众专利搜索

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发明名称	EMBEDDING OF GROOVE
摘要
申请公布号	JPS6474745(A)	申请公布日期	1989.03.20
申请号	JP19870232823	申请日期	1987.09.17
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	AOI NOBUO;YAMAMOTO SHINICHI;NISHIO MIKIO;NAKAO ICHIRO
分类号	H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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