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发明名称
CLEANER
摘要
申请公布号
JPH0194990(A)
申请公布日期
1989.04.13
申请号
JP19870249153
申请日期
1987.10.02
申请人
TAKAHIRA ASHITO
发明人
TAKAHIRA ASHITO
分类号
B08B3/02;H01L21/304
主分类号
B08B3/02
代理机构
代理人
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