发明名称 TARGET FOR SPUTTERING WITH COOLING MEMBER
摘要 PURPOSE:To prevent the camber arising from soldering by specifying the hardness of a cooling member which is to be brazed to a body part and is different in coefft. of thermal expansion from the body part. CONSTITUTION:The Vickers harness of the above-mentioned cooling member is confined to <=50 Hv. The cooling member is thereby more easily plastically deformed and difference in thermal shrinkage at the time of brazing is absorbed by the plastic deformation of the cooling member itself, by which the generation of the chamber is relieved. For example, Cu 2 is plated on either of the front or rear of a pure Cr target body 1 and said body is heated to 260 deg.C to fit a brazing filler metal 3 having 250 deg.C m.p. onto the Cu plating. The brazing filler metal is fitted to one face of a heat treated oxygen-free copper plate 4 which is the cooling member in the same manner as mentioned above. The surfaces of such brazing filler metals are joined and while the brazing filler metals are kept pressurized under 0.15kg/cm<2> pressure, the brazing filler metals are heated to about 260 deg.C to discharge the brazing filler metals to some extent; thereafter, the joined material is cooled as it is.
申请公布号 JPH01132758(A) 申请公布日期 1989.05.25
申请号 JP19870290367 申请日期 1987.11.17
申请人 HITACHI METALS LTD 发明人 TANIGUCHI SHIGERU;MIZUGUCHI TAKEO
分类号 C23C14/34 主分类号 C23C14/34
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