| 摘要 |
PURPOSE:To provide a vessel having a long life in high-temp. use by coating an Ta-base metal with a Ir-base metal in which oxides are dispersed. CONSTITUTION:This clad vessel is formed by coating Ta or Ta alloy with Ir or Ir alloy in which oxides are dispersed. Since this vessel has excellent oxidation resistance, and further, oxides are dispersed in a coating film and grain growth at high temp. is inhibited, the survive life of this vessel can be prolonged. Moreover, Al2O3, ZrO2, Y2O3, etc., can be used as the above oxides, and it is preferable to regulate the amount of oxides to about 0.02-10vol.%. The above clad vessel can be manufactured, e.g., by simultaneously using two targets of Ir and Y2O3 and executing binary simultaneous sputtering of the above two targets onto the inner wall of a crucible made of Ta. |
