| 摘要 |
PURPOSE:To know a trend of generating a defect in a process by collating and calculating a plurality of data regarding the defect position and size of an element to be inspected each other by a foreign matter inspecting means. CONSTITUTION:A reticle 1 of an element to be inspected is placed in an inspection chamber 2. Data regarding the position and size of a defect from defect detecting means 5 for detecting the defect of the element to be inspected are stored in a memory 22. A CPU 20 subtracts data in the element 1 to be inspected before a process from the data regarding the position and size of the defect in the element 1 to be inspected after the process by an arithmetic unit 23. Only the defect generated in the element 1 to be inspected can be selected in the process. Accordingly, the position and size of the defect are analyzed by the CPU 20, thereby accurately diagnosing a cause or the like of generating the defect in the process. |
