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发明名称
FORMATION OF FINE PATTERN
摘要
申请公布号
JPH01155627(A)
申请公布日期
1989.06.19
申请号
JP19870314106
申请日期
1987.12.14
申请人
OKI ELECTRIC IND CO LTD
发明人
KIMURA YASUKI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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