发明名称 Vacuum deposition of selenium alloy
摘要 A process for fabricating an electrophotographic imaging member is disclosed comprising providing in a vacuum chamber at least one crucible containing particles of an alloy comprising selenium and an alloying component selected from the group consisting of tellurium, arsenic, and mixtures thereof, providing a substrate in the vacuum chamber, applying a partial vacuum to the vacuum chamber, and rapidly heating the crucible to a temperature between about 250 DEG C. and 450 DEG C. to deposit a thin continuous selenium alloy layer on the substrate. A plurality of selenium containing layers may be formed by providing in a vacuum chamber at least one first layer crucible containing particles of selenium or a sellenium alloy, at least one second layer crucible containing particles of an alloy comprising selenium, and a substrate, applying a partial vacuum to the vacuum chamber, heating the particles in the first layer crucible to deposit a thin continuous selenium or a selenium alloy first layer on the substrate, maintaining the particles in the second layer crucible at a first temperature below about 130 DEG C. while the thin continuous selenium or a selenium alloy first layer is being deposited on the substrate, and rapidly heating the particles in the second layer crucible to a second temperature between about 250 DEG C. and about 450 DEG C. to deposit a thin continuous selenium alloy second layer on the substrate.
申请公布号 US4842973(A) 申请公布日期 1989.06.27
申请号 US19880179374 申请日期 1988.04.08
申请人 XEROX CORPORATION 发明人 BADESHA, SANTOKH S.;CHERIN, PAUL;FOLEY, GEOFFREY M. T.;LEES, BARRY A.;WOZNIAK, JOHN
分类号 G03G5/08;C23C14/06;G03G5/082 主分类号 G03G5/08
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