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发明名称
CRUCIBLE FOR ELECTRON-BEAM VAPORIZATION SOURCE
摘要
申请公布号
JPH01165763(A)
申请公布日期
1989.06.29
申请号
JP19870323696
申请日期
1987.12.23
申请人
KAWASAKI STEEL CORP
发明人
SUZUKI KAZUHIRO;IGUCHI MASAO
分类号
C23C14/24;C23C14/30
主分类号
C23C14/24
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