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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01169969(A)
申请公布日期
1989.07.05
申请号
JP19870333879
申请日期
1987.12.24
申请人
FUJITSU LTD
发明人
IKEDA KAZUTO
分类号
H01L27/12;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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