EPITAXIAL GROWTH METHOD,申请号JP19870327144-传众专利搜索

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发明名称	EPITAXIAL GROWTH METHOD
摘要
申请公布号	JPH01170015(A)	申请公布日期	1989.07.05
申请号	JP19870327144	申请日期	1987.12.25
申请人	HITACHI LTD	发明人	SHIMADA JUICHI;MIYAO MASANOBU;ISHIZAKA AKITOSHI;ISHINO MASAKAZU;YOSHIMURA TOSHIYUKI
分类号	H01L21/20;H01L21/203;H01L21/205	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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