| 摘要 |
PURPOSE:To make it possible to quantitatively and accurately grasp the direction and the amount of distortion by a method wherein true circles having the same diameter are arranged at each vertex position of a regular polygon. CONSTITUTION:Twelve true circles 1 are arranged in such a manner that the center C1 of the true circles 1 is coincided with each vertex of an imagined regular dodecagon 3, and the length of each side of the regular dodecagon 3 is set in the measurements in excess of the diameter of the true circles 1. Accordingly, all the shortest distances D1 between each circumference of the true circles 1 adjacently positioned with each other are equally formed. In the transfer pattern formed by transferring the pattern to be used for evaluation of a distorted figure on a sample, the shape of each ellipse 4 formed by the distortion of each true circle 1 is compared with its relative positional relation. As a result, the direction of distortion and the amount of distortion can be grasped easily, and a quantitative measurements can be conducted quickly in a simple manner. |
