PLASMA FORMING DEVICE AND THIN FILM FORMING DEVICE UTILIZING PLASMA,申请号JP19880025602-传众专利搜索

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发明名称	PLASMA FORMING DEVICE AND THIN FILM FORMING DEVICE UTILIZING PLASMA
摘要
申请公布号	JPH01201471(A)	申请公布日期	1989.08.14
申请号	JP19880025602	申请日期	1988.02.08
申请人	NIPPON TELEGR & TELEPH CORP <NTT>	发明人	MATSUOKA SHIGETO;ONO KENICHI
分类号	C23C14/34;C23C14/35	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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